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Tilt (ΘX-ΘY) Displacement (Z) Position (X-Y)
Measurement Range ±60min ±1.0㎜ ±0.5㎜
Resolution ※1 0.02min 0.2㎛ 0.5㎛
Working distance 80㎜
Measurement speed Analogy : Shift between 500/10,000 times/sec
Digital : 50 times/sec
Measurement object Ø3mm Optical flat mirror(the reflection rate over 80% is recommended)
Analog output BNC Connector : ±5V Tilt(ΘX,ΘY), Displacement(Z), Position(X,Y) [If ND +10V]
Digital output RS-232C Spec
Monitor output NTSC Spec, BNC Connector
Power supply AC 100~240V 50/60Hz
IH HI-TECH CO.,LTD.

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E-mail : ihhitech@ihhitech.com