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Measurement Object

?TARGET(FH-2312)

Measurement Items

Tilt(θX,θY)、Displacement(Z)、

Position(X,Y)、Rotation(θ)

Working Dantance

90±0.5mm※2

Measurement Range

Tilt(θX,θY)

±60 min(Circular range)

Displacement(Z)

±1.0mm

Position(X,Y)

±0.5mm

Rotation(θ)

±90min

Resolution

Tilt(θX,θY)

0.002 min

Displacement(Z)

0.06μm

Position(X,Y)

0.02μm

Rotation(θ)

0.01 min

Repeatabillity

※3

Tilt(θX,θY)

0.03 min

Displacement(Z)

1.0μm

Position(X,Y)

0.5μm

Rotation(θ)

0.2 min

Linearity※4

Tilt(θX,θY)

±0.17% of F.S.

Displacement(Z)

±0.44% of F.S.

Position(X,Y)

±0.6% of F.S.

Rotation(θ)

±0.3% of F.S.

IH HI-TECH CO.,LTD.

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