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IH HI-TECH.CO.,LTD
 
Ultrahigh Accurate 3-D  Profilometer
UA3P-L
UA3P-500H
UA3P-650H
UA3P-400T
UA3P
 
Home>Product>Ultrahigh Accurate 3-D Profilometer






Molel UA3P-300 UA3P-4 UA3P-5
Main body outer dimensions(mm)
(W x H x D)
700 Ⅹ 780 Ⅹ 1500 (mm) 1000 Ⅹ 1100 Ⅹ 1400 (mm) 1200 Ⅹ1345 Ⅹ 1550 (mm)
Measurement range
(X, Y, Z-axis)
30 Ⅹ 30 Ⅹ 20 mm 100 Ⅹ100 Ⅹ 350 mm 200 Ⅹ 200 Ⅹ 45 mm
Scale He-Ne Frequency stabilized Laser
Probe Atomic force probe
Ruby Tip curvature radius 0.5 ㎜
Diamond : Tip curvature radius 2 ㎛
Maximum measurement angle 75° 60°
Probe Measurement accuracy Ruby stylus
Surface inclined angle
Up to 30°     0.01 ~ 0.05 ㎛
Up to 45°     ~ 0.08 ㎛
Up to 60°     ~ 0.15 ㎛
Up to 70°     ~ 0.15 ㎛
(downward)
Ruby stylus
Surface inclined angle
Up to 30°     0.01 ~ 0.05 ㎛
Up to 45°     ~ 0.1 ㎛
Up to 60°     ~ 0.3 ㎛
Standard diamond stylus
Surface inclined angle
Up to 30° up to 0.1 ㎛ : Actual value(Not guaranteed value)
Measurement error of coordinates Up to 100 ㎜ : Within 0.05 ㎛(Repeatabilty : Within 0.05 ㎛)
Up to 200 ㎜ : Within 0.1 ㎛(Repeatabilty : Within 0.05 ㎛)
Measurement speed 0.005 to 5 ㎜/s
variable in multiple steps
0.01 to 10 ㎜/s
variable in multiple steps
Basic software Automatic NC creation, Auto alignment(including correction probe radius), Data edit, Auto centering, Realtime monitoring in measurement, 3-D color graph, Risarju shape of waves display function
 
IH HI-TECH CO.,LTD.

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